| 摘要 |
PURPOSE:To facilitate the handling of a semiconductor wafer by a method wherein the upper and lower holding segments are projected from the base part at which both segments are combined with elasticity in a body, the tip end of the lower holding segment is made approximately semicircular and the upper holding segment contacting with the lower one is provided with three pads. CONSTITUTION:The water holder is composed of the upper and lower holding segments 12, 11, both base parts are combined with elasticity in a body. Also the lower holding part 13 is formed at the tip end of the lower holding segment 11 so that it may be gradually expanded to make itself approximately semicircular, the arcwise upper holding part 14 is formed at the tip end of the upper holding segment 12 so that it may correspond to the expansion of the lower holding part 13, and three holding pads 15a-15c are provided and projected from the lower side of the lower holding part 14. In this way, when a wafer is held by the holding parts 13, 14, it can be held at three points, the holding can be secured to avoid dropping the wafer. |
