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经营范围
发明名称
PLASMA REACTOR
摘要
申请公布号
JPS55154585(A)
申请公布日期
1980.12.02
申请号
JP19800063297
申请日期
1980.05.13
申请人
TEGAL CORP
发明人
JIYORUJIYU JIEI GORIN;JIYOSEFU TEII HOTSUGU
分类号
C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/46
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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