A MICROMACHINED DEVICE FOR MEASURING A VIBRATION

摘要

A micro sensor for vibration measurement is provided to detect vibration easily at low power through wireless sensor network and to thereby facilitate signal processing. A micro sensor for vibration measurement comprises a substrate(160), one or more masses(110) moving in reaction to vibration, a conductor spring(120) which moves according to the movement of the mass while supporting the masses, fixed parts(130) which are connected to both ends of the conductor spring and keep the masses and the conductor spring apart from the substrate, and a resistance(140) forming a closed circuit together with the conductor spring and the fixed parts. The masses are positioned in the middle of the conductor spring. The resistance connects a magnetic body(170) which is formed on the bottom of the substrate and creates a magnetic field to the fixed parts.