| 摘要 |
PROBLEM TO BE SOLVED: To swiftly and securely find the heavy failure of the sealability in a seal member, and further, to securely find an extremely trace amount of a leak beforehand or after that.SOLUTION: A first stage leak test where the inside of an internal space formed at the inside of a substrate holder 18 in such a manner that, when the substrate is held with the substrate holder 18, the same is sealed with seal members 66, 68 is evacuated, and whether the internal space reaches a prescribed vacuum pressure after a fixed time is tested is performed, and a second stage leak test where the internal space is sealed, and whether the pressure at the inside of the internal space changes to a prescribed value or higher within a prescribed time is tested is performed, and using the substrate holder 18 passed through the second leak test, the substrate is subjected to plating treatment at a plating tank 34.SELECTED DRAWING: Figure 9 |
