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发明名称
摘要
申请公布号
JPS5532230(B2)
申请公布日期
1980.08.23
申请号
JP19770034233
申请日期
1977.03.28
申请人
发明人
分类号
H01L29/78;H01L21/8247;H01L29/40;H01L29/788;H01L29/792
主分类号
H01L29/78
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代理人
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