Selector device for the determination of the type of electroconductivity in semiconductor wafers

摘要

A novel selector device for the determination of the conductivity-type in a semiconductor wafer utilizes the determination of the polarity of the electromotive force produced in the wafer by the Hall effect. The device comprises two pairs of probes in diagonal arrangement for supplying an electric current through the wafer and for detecting the electromotive force, respectively, by contacting the wafer surface, and a pair of permanent magnets positioned oppositely with the wafer in between to produce a magnetic field perpendicular to the wafer. One of the permanent magnets is located within the circumference determined by the probes.