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发明名称
SEMICONDUCTOR MATERIALS
摘要
申请公布号
GB1566454(A)
申请公布日期
1980.04.30
申请号
GB19760048437
申请日期
1976.11.19
申请人
GEC
发明人
分类号
C30B13/06;C30B13/10;H01L21/208;H01L21/24;H01L21/40;H01L21/761;H01L29/04;(IPC1-7):B01J17/00
主分类号
C30B13/06
代理机构
代理人
主权项
地址
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