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经营范围
发明名称
BEAM WIDTH DETECTOR
摘要
申请公布号
JPS5541723(A)
申请公布日期
1980.03.24
申请号
JP19780114333
申请日期
1978.09.18
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TAKIGAWA TADAHIRO;KATOU YOSHIHIDE
分类号
H01J37/04;H01J37/28;H01L21/027;H01L21/30
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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