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发明名称
摘要
申请公布号	JPS553806(B1)	申请公布日期	1980.01.26
申请号	JP19680060322	申请日期	1968.08.22
申请人		发明人
分类号	H01L21/8222;H01L21/22;H01L21/225;H01L21/76;H01L21/8248;H01L27/06;(IPC1-7):H01L21/22	主分类号	H01L21/8222
代理机构		代理人
主权项
地址

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