Oriented silicon single crystal rod prodn. - by crucible-free zone melting with very accurate orientation of seed crystal

摘要

Prodn. of 111 -oriented Si monocrystal rods with min. mantle surface by noncrucible zone melting involves placing the ends of the rods, clamped vertically in holders, in a recipient and passing the melt zone upwards through the rod from a seed crystal. The seed crystal is oriented as accurately as possible in the 111 direction in the holder during the passage of the melt zone through the cone of the rod and zone melting of the cylindrical pt. of the rod is continued with increasing misorientation up to a final value. The cross-section of the rods is as round as possible, and the final misorientation is in the 0.7-1 degrees range.