| 摘要 |
<p>PURPOSE:To increase a voltage nonlinear index and decrease its variation with time, by laminating a zinc oxide thin film and a strontium titanate thin film alternately. CONSTITUTION:A CrAu vaporization film 2 is formed on the substrate 1 of glass and the like and then, a ZnO film 3 is laminated in a mixed gas atmosphere of Ar and O2 gases and further, a SrTiO3 film 4 is laminated in an atmosphere of an O2 gas alternately on the above film 2 with a high frequency sputtering process. Voltage nonlinear indices and rise voltage values regarding the above films are determined according to the film thicknesses of ZnO and SrTiO3 films 3 and 4. Consequently, the ZnO film 3 is 0.1-5mum thick or it is preferable to have its thickness of 0.3-2mum and then, the SrTiO3 film 4 is 0.01-1mum thick or it is suitable to have its thickness of 0.05-0.7mum. Finally, electrodes 5 and 6 are mounted.</p> |
