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发明名称
SISTEMA ED APPARECCHIATURA PER CORREGGERE AUTOMATICAMENTE ABER RAZIONI DI UN FASCIO DI PARTICEL LE CARICATE
摘要
申请公布号
IT1038693(B)
申请公布日期
1979.11.30
申请号
IT19750024021
申请日期
1975.06.05
申请人
IBM CORP
发明人
分类号
H01J37/147;H01J37/153;H01J37/21;H01L21/027;(IPC1-7):H01J/
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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