| 摘要 |
PURPOSE:To form the thermal head which is superior in oxidation resistance and adrasion resistance and is long in service life despite the use at high temperature by using a thin film of metal borides as a heating resistor and a thin film of zirconium oxides as a protection layer. CONSTITUTION:A heating resistor layer 2 of a thin film composed of a metal boride such as zirconium boride, hafnium boride or other is formed through electron beam evaporation or sputtering on a substrate 1 such as of ceramics, glass or other, after which an electric conductor layer 3 is formed thereon by evaporating aluminum, gold or other and further zirconium oxide is evaporated thereon to provide a protection layer of about 1 to 20mu in thickness (preferably 3 to 10mu) thereby forming the thermal head. |
