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发明名称
METHOD OF PRODUCING INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS54140167(A)
申请公布日期
1979.10.31
申请号
JP19780048949
申请日期
1978.04.24
申请人
NIPPON ELECTRIC CO
发明人
OKAMOTO HIDEO;SATOU AKIO
分类号
H05K3/32;B23K20/00;H01L21/60;H01L21/603;H01L23/50;H05K3/00
主分类号
H05K3/32
代理机构
代理人
主权项
地址
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