发明名称 |
PHOTOSENSITIVE COMPOSITION |
摘要 |
A sensitive composition comprising polymethyl isopropenyl ketone of limited molecular weight and a compound of a given general formula. The formation of a pattern of less than 1 mu m is made possible by employing ultraviolet rays of wave lengths of 100-350 nm in place of those of 350-450 nm utilized in conventional processes. The sensitive composition is highly sensitive to ultraviolet rays in said wave range and reproduces a fine pattern precisely. |
申请公布号 |
JPS54125024(A) |
申请公布日期 |
1979.09.28 |
申请号 |
JP19780032501 |
申请日期 |
1978.03.22 |
申请人 |
TOKYO OUKA KOUGIYOU KK;TSUDA MINORU |
发明人 |
TSUDA MINORU;NAKAMURA YOUICHI;NAGATA HIDEO;NAKANE HISASHI |
分类号 |
G03F7/004;C08F2/00;C08F2/50;C08F16/00;C08F16/34;C08F16/38;C08L29/00;G03F7/039;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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