发明名称 PHOTOSENSITIVE COMPOSITION
摘要 A sensitive composition comprising polymethyl isopropenyl ketone of limited molecular weight and a compound of a given general formula. The formation of a pattern of less than 1 mu m is made possible by employing ultraviolet rays of wave lengths of 100-350 nm in place of those of 350-450 nm utilized in conventional processes. The sensitive composition is highly sensitive to ultraviolet rays in said wave range and reproduces a fine pattern precisely.
申请公布号 JPS54125024(A) 申请公布日期 1979.09.28
申请号 JP19780032501 申请日期 1978.03.22
申请人 TOKYO OUKA KOUGIYOU KK;TSUDA MINORU 发明人 TSUDA MINORU;NAKAMURA YOUICHI;NAGATA HIDEO;NAKANE HISASHI
分类号 G03F7/004;C08F2/00;C08F2/50;C08F16/00;C08F16/34;C08F16/38;C08L29/00;G03F7/039;H01L21/027 主分类号 G03F7/004
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