VORRICHTUNG ZUR DURCHFUEHRUNG VON HOCHTEMPERATURPROZESSEN AN HALBLEITERSCHEIBEN,申请号DD19780206525-传众专利搜索

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发明名称	VORRICHTUNG ZUR DURCHFUEHRUNG VON HOCHTEMPERATURPROZESSEN AN HALBLEITERSCHEIBEN
摘要
申请公布号	DD137531(A1)	申请公布日期	1979.09.12
申请号	DD19780206525	申请日期	1978.07.05
申请人	WERNER,HEINZ,DD	发明人	WERNER,HEINZ,DD
分类号	H01L21/00;H01L21/04;(IPC1-7):B01J17/34	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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