摘要 |
PURPOSE:To find defective positions easily to shorten the time required for inspection by measuring electric resistances of electrodes, which will be connected to one bus, one by one to perform short-circuit inspection under the state where the other bus is first formed when plural busses and electrodes connected to these busses are formed on a substrate. CONSTITUTION:Electrode groups 21 to 2n are connected only to X2 bus 2 which is provided in one side on glass substrate 8a, and electrodes 11 to 1n which will belong to groups of X1 bus 1 are left taken out individually, and under this state, substrate 8a is produced. Next, continuity measurement is performed between bus 2 and electrode groups 21 to 2n belonging to bus 2 and about electrode groups 11 to 1n which will belong to bus 1, thereby inspecting disconnection defects. After that, insulation resistance between bus 2 and electrode groups 11 to 11 which will belong to bus 1 is measured successively, however, defective electrodes can be found immediately since bus 1 has not been formed yet. Thus, defective electrodes are repaired when they exist, and all is made into a normal state beforehand, and other substrate 8b is fitted. |