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发明名称
摘要
申请公布号
FR2266310(B1)
申请公布日期
1979.06.08
申请号
FR19750009938
申请日期
1975.03.28
申请人
SIEMENS AG
发明人
分类号
H01L29/80;H01L21/205;H01L21/338;H01L27/12;H01L29/00;H01L29/47;H01L29/812;H01L29/872;(IPC1-7):H01L29/76
主分类号
H01L29/80
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代理人
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