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发明名称
SEMICONDUCTOR PRODUCING DEVICE
摘要
申请公布号
JPS5460862(A)
申请公布日期
1979.05.16
申请号
JP19770127870
申请日期
1977.10.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIHARA KAORU;MORITA YUTAKA;KOBAYASHI KUNIO
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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