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发明名称
CHARGED PARTICLE BEAM APPARATUS
摘要
申请公布号
JPS5451098(A)
申请公布日期
1979.04.21
申请号
JP19770117399
申请日期
1977.09.30
申请人
NIPPON ELECTRON OPTICS LAB
发明人
TAKIZAWA TADAO
分类号
B23K15/02;B23K15/00
主分类号
B23K15/02
代理机构
代理人
主权项
地址
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