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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5441670(A)
申请公布日期
1979.04.03
申请号
JP19770107731
申请日期
1977.09.09
申请人
HITACHI LTD
发明人
MATSUNAGA AKIRA
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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