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发明名称
FORFARANDE FOR TILLVERKNING AV HALLARELEMENT AV KISEL ELLER KISELKARBID
摘要
申请公布号
SE405812(B)
申请公布日期
1979.01.08
申请号
SE19740012432
申请日期
1974.10.02
申请人
* SIEMENS AG
发明人
W * DIETZE;G * BACHMANN
分类号
C01B33/02;C01B33/027;C23C16/22;C23C16/44;C23C16/455;C30B31/14;H01L21/22;H01L21/673;(IPC1-7):01J17/34
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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