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发明名称
摘要
申请公布号
JPS5347301(B2)
申请公布日期
1978.12.20
申请号
JP19760129349
申请日期
1976.10.29
申请人
发明人
分类号
C01B33/02;C30B15/34;C30B29/06;H01L21/208
主分类号
C01B33/02
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代理人
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