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发明名称
A METHOD OF OBTAINING QUARTZ FILM OVER SILICON
摘要
申请公布号
BG25767(A1)
申请公布日期
1978.12.12
申请号
BG19770037566
申请日期
1977.10.13
申请人
KONOVA,ANKA A.
发明人
KONOVA,ANKA A.
分类号
B01D9/02;C25D9/00;(IPC1-7):H01L41/14;C23F7/02
主分类号
B01D9/02
代理机构
代理人
主权项
地址
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