发明名称 |
Modified optical transmission technique for characterizing epitaxial layers |
摘要 |
An improved method of determining the energy bandgap of an epitaxial semiconductor layer on a substrate corrects for an overestimation of energy gap yielded by normal optical transmittance measurements. The overestimation of energy bandgap is caused by a graded bandgap region which exists between the epitaxial semiconductor layer and the substrate.
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申请公布号 |
US4128338(A) |
申请公布日期 |
1978.12.05 |
申请号 |
US19770807608 |
申请日期 |
1977.06.17 |
申请人 |
HONEYWELL INC. |
发明人 |
WONG, THEODORE T. S. |
分类号 |
G01R31/265;(IPC1-7):G01N21/22 |
主分类号 |
G01R31/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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