Active vibration isolation system having a hysteresis free pneumatic bearing

摘要

The arrangement has a pneumatic insulator (2) for supporting a mass (1), and a pneumatic control circuit (6) for controlling a control valve (4). A movement sensor (9) determines a vibration distance of the mass and a vibration suppression control circuit (11) controls an actuator (10) based on the sensor. A dither-signal generator (8) is provided for manipulation of movement condition of a valve unit, where dither-vibration is produced by the mass. A dither-compensation circuit (12) is provided to control the actuator based on the suppression of the vibration of the mass. An independent claim is also included for a method of vibration insulation of a mass.