发明名称 |
Piezoelectric thin film, method of manufacturing the same, piezoelectric thin film manufacturing apparatus and liquid ejection head |
摘要 |
A piezoelectric thin film is manufactured by sequentially executing: a step of coating a substrate by applying a coating solution containing an organic solvent and a piezoelectric thin film precursor to form a coating layer; a step of evaporating the organic solvent from the coating layer in a windless environment to obtain a dried coating layer containing the piezoelectric thin film precursor; and a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor. |
申请公布号 |
US9437806(B2) |
申请公布日期 |
2016.09.06 |
申请号 |
US201414549839 |
申请日期 |
2014.11.21 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Kobayashi Motokazu;Kotani Yoshinori;Koketsu Naoyuki |
分类号 |
H01L41/22;H04R17/00;H01L41/187;H01L41/08;B41J2/14;B41J2/16;H01L41/317;H01L41/09 |
主分类号 |
H01L41/22 |
代理机构 |
Fitzpatrick, Cella, Harper & Scinto |
代理人 |
Fitzpatrick, Cella, Harper & Scinto |
主权项 |
1. A piezoelectric thin film manufacturing method comprising:
a step of preparing a substrate having a coating layer formed thereon, the coating layer containing an organic solvent and a piezoelectric thin film precursor; a step of obtaining a dried coating layer containing the piezoelectric thin film precursor by evaporating the organic solvent from the coating layer in a state where a shield plate is arranged between an exhaust port for expelling an exhaust of the evaporated organic solvent and the substrate; and a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor. |
地址 |
Tokyo JP |