| 发明名称 |
Ion beam generator having concentrically arranged frustoconical accelerating grids |
| 摘要 |
A grid system for an ion beam generator is provided having a frustoconical shape so that the collimated ion beam converges at a predetermined angle toward the target to provide selective beveled etching.
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| 申请公布号 |
US4119881(A) |
申请公布日期 |
1978.10.10 |
| 申请号 |
US19780881273 |
申请日期 |
1978.02.27 |
| 申请人 |
CONTROL DATA CORPORATION |
发明人 |
CALDERON, ARTHUR |
| 分类号 |
H01J27/02;H01J37/305;(IPC1-7):H05H5/02 |
主分类号 |
H01J27/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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