| 发明名称 |
MANUFACTURE OF SEMICONDUCTOR DEVICE |
| 摘要 |
<p>PURPOSE:To carry out scribing by provideng a laser beam absorber layer on a comparatively thick glass protective film and radiation a comparatively feeble laser beam over the absorber layer.</p> |
| 申请公布号 |
JPS53105964(A) |
申请公布日期 |
1978.09.14 |
| 申请号 |
JP19770020607 |
申请日期 |
1977.02.26 |
| 申请人 |
NIPPON ELECTRIC CO |
发明人 |
KACHI MASAO;ASAMI HIROSHI |
| 分类号 |
H01L21/301;H01L21/302;H01L21/78 |
主分类号 |
H01L21/301 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
