发明名称 EVAPORATING APPARATUS BY SPUTTERING
摘要 PURPOSE:To form efficiently the evaporated film having an uniform film property, by constituting the magnetic field generating means for generating the magnetic field intersecting at nearly right angles to the excitation electric field with the electromagnet to be excited with the AC power source.
申请公布号 JPS5372790(A) 申请公布日期 1978.06.28
申请号 JP19760147770 申请日期 1976.12.10
申请人 HITACHI LTD 发明人 OOTA MASATAKA
分类号 C23C14/34;C23C14/35;C23C14/36;H01J37/34 主分类号 C23C14/34
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