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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5370687(A)
申请公布日期
1978.06.23
申请号
JP19760146112
申请日期
1976.12.07
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SAGA AKIO
分类号
H01L21/76;H01L21/265;H01L21/306
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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