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发明名称
VERFAHREN ZUR HERSTELLUNG VON HALBLEITERVORRICHTUNGEN
摘要
申请公布号
DE2752698(A1)
申请公布日期
1978.06.01
申请号
DE19772752698
申请日期
1977.11.25
申请人
FUJITSU LTD.
发明人
ITO,TAKASHI
分类号
H01L21/265;H01L21/28;H01L21/3115;H01L21/8234;H01L29/06;H01L29/51;H01L29/78;(IPC1-7):H01L29/78;H01L21/26
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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