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发明名称
CAP*STEM SUPPLY DEVICE
摘要
申请公布号
JPS5355982(A)
申请公布日期
1978.05.20
申请号
JP19760130880
申请日期
1976.10.29
申请人
NIPPON ELECTRIC CO
发明人
TSUCHIYA TSUNEHIKO
分类号
H01L23/04;H01L21/50;H01L21/56;H01L21/68
主分类号
H01L23/04
代理机构
代理人
主权项
地址
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