发明名称 |
Uniform thermomigration utilizing sample movement |
摘要 |
The geometric configuration of a molten zone migrating through a solid body of semiconductor material during thermal gradient zone melting is maintained by noncentro-symmetric rotation of the solid body about an axis displaced therefrom, by centro-symmetric rotation of the solid body, by translation of the solid body, by a combination of centro-symmetric rotation and translation of the solid body or by a combination of noncentro-symmetric rotation and translation of the solid body while being heated by a suitable heat source.
|
申请公布号 |
US4081293(A) |
申请公布日期 |
1978.03.28 |
申请号 |
US19760733238 |
申请日期 |
1976.10.18 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
CLINE, HARVEY E.;ANTHONY, THOMAS R. |
分类号 |
C30B13/02;H01L21/24;(IPC1-7):H01L21/22 |
主分类号 |
C30B13/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|