发明名称 Uniform thermomigration utilizing sample movement
摘要 The geometric configuration of a molten zone migrating through a solid body of semiconductor material during thermal gradient zone melting is maintained by noncentro-symmetric rotation of the solid body about an axis displaced therefrom, by centro-symmetric rotation of the solid body, by translation of the solid body, by a combination of centro-symmetric rotation and translation of the solid body or by a combination of noncentro-symmetric rotation and translation of the solid body while being heated by a suitable heat source.
申请公布号 US4081293(A) 申请公布日期 1978.03.28
申请号 US19760733238 申请日期 1976.10.18
申请人 GENERAL ELECTRIC COMPANY 发明人 CLINE, HARVEY E.;ANTHONY, THOMAS R.
分类号 C30B13/02;H01L21/24;(IPC1-7):H01L21/22 主分类号 C30B13/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利