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发明名称
METHOD OF ETCHING
摘要
申请公布号
JPS5319315(A)
申请公布日期
1978.02.22
申请号
JP19760095156
申请日期
1976.08.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHII KENJI;TANIGUCHI TAKASHI
分类号
C04B41/91;C03C15/00
主分类号
C04B41/91
代理机构
代理人
主权项
地址
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