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发明名称
摘要
申请公布号
JPS5242634(B2)
申请公布日期
1977.10.25
申请号
JP19730098295
申请日期
1973.09.03
申请人
发明人
分类号
H01L29/73;H01L21/316;H01L21/331;H01L29/06;H01L29/861
主分类号
H01L29/73
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