Evaporation boat for high vacuum plant - has cover with central opening which directs stream for efficient coating

摘要

A point-shaped, alignable spatter-free evapn. source for evapn. material in a high vacuum plant has a tray-shaped evapn. boat heated by direct current such that the boat is closed at least on the wall sides by a labyrinth-shaped cover over the material to be evapd. The cover contains a central opening with an intermediate piece at a distance from the cover an contg. >=2 edge regions provided with passages. The source produces a precise stream of evapn. material without being excessively large or complicated.