| 发明名称 |
STRIPPING SOLUTION OF PHOTOSOLUBILIZABLE LIGHT SENSITIVE RESIN |
| 摘要 |
PURPOSE:To perfectly remove a positive type photoresist for use in forming electrodes of surface wave filter elements and the like, even if its surface becomes a passive state, by mixing acetone and an ammonia aqueous solution at a specified ratio. |
| 申请公布号 |
JPS52100234(A) |
申请公布日期 |
1977.08.23 |
| 申请号 |
JP19760017388 |
申请日期 |
1976.02.19 |
| 申请人 |
SONY CORP |
发明人 |
YAMANOI HIROSHI;KAMIHIRA AKIRA |
| 分类号 |
H01L21/30;G03F7/00;G03F7/42;H01L21/027 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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