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发明名称
FORMATION OF GRROVE IN SEMICONDUCTOR WAFER
摘要
申请公布号
JPS5265672(A)
申请公布日期
1977.05.31
申请号
JP19750141658
申请日期
1975.11.28
申请人
HITACHI LTD
发明人
YAMADA KOUHEI;YAMADA KOUICHIROU;SUGAWARA KATSUO
分类号
H01L21/3063;H01L21/302
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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