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发明名称
摘要
申请公布号
FR2265112(B1)
申请公布日期
1977.04.15
申请号
FR19750002836
申请日期
1975.01.20
申请人
IBM
发明人
分类号
H01L21/30;G01B11/26;G02B27/00;G03F9/00;H01L21/027;(IPC1-7):G02B27/00
主分类号
H01L21/30
代理机构
代理人
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