| 摘要 |
<p>PURPOSE:To improve the detection sensitivity by providing a heater element resistance body on a substrate across an air layer and providing a fluid temperature detecting element resistance body on the substrate across a dielectric film. CONSTITUTION:The detecting element consisting of the heater element resistance body Rh and fluid temperature detecting element resistance body Rf is arranged on the substrate 1. The resistance body Rh is provided on the substrate 1 across the air layer 4 and the resistance body Rf is provided o the substrate 1 across a glass thin film 2b as the dielectric film. The air layer 4 is provided under the resistance body Rh, so heat insulation to below the resistance body Rh is improved and the heat capacity of the resistance body Rh can be reduced, thereby raising the temperature of the resistance body Rh by small-current heating. The dielectric film 2b, on the other hand, is provided under the resistance body Rf, so heat is radiated from the resistance body Rf to the substrate 1 through the dielectric film 2b, so the temperature rise of the resistance body Rf can be suppressed small, and the area of the resistance body Rf is made large to hold a compensating function for the fluid temperature of the resistance Rf.</p> |
