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发明名称
METHOD FOR FORMATION OF CHEMICALLY FORMED COBALT FILM
摘要
申请公布号
JPH059745(A)
申请公布日期
1993.01.19
申请号
JP19910316081
申请日期
1991.11.29
申请人
BOEING CO:THE
发明人
MASHIASU PII SHIYURIIBAA
分类号
C23C22/05;C23C22/56;C23C22/57;C23C22/58;C23C22/68;C23C22/70;C23C22/83
主分类号
C23C22/05
代理机构
代理人
主权项
地址
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