| 发明名称 |
DEFECTS PATTERN DETECTION SYSTEM |
| 摘要 |
<p>PURPOSE:To distinguish the roundness and the defect of pattern angle, by using the ratio between the transmitting diffracted light of the shield section equivalent part and that of the transmitting section equivalent part.</p> |
| 申请公布号 |
JPS5231674(A) |
申请公布日期 |
1977.03.10 |
| 申请号 |
JP19750072577 |
申请日期 |
1975.06.14 |
| 申请人 |
FUJITSU LTD |
发明人 |
NAKAJIMA MASAHITO;FURUKAWA YASUO |
| 分类号 |
G01B11/00;G01B11/30;G01N21/88;G01N21/956;H01L21/027;H01L21/30;H01L21/302;H01L21/66 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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