| 发明名称 |
Vacuum contact printing system and process for electronic circuit photomask replication |
| 摘要 |
There is disclosed a vacuum contact printer and process for printing copy plates from master photomask plates depicting electronic circuitry.
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| 申请公布号 |
US4007987(A) |
申请公布日期 |
1977.02.15 |
| 申请号 |
US19760648209 |
申请日期 |
1976.01.12 |
| 申请人 |
TAMARACK SCIENTIFIC CO. INC. |
发明人 |
SHEETS, RONALD E. |
| 分类号 |
G03B27/20;(IPC1-7):G03B27/20 |
主分类号 |
G03B27/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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