| 摘要 |
PURPOSE:To prevent the generation of inspection irregularity and to shorten an inspection time by detecting an abnormal place while the entire inspection range of a material to be inspected is subjected to square scanning at a coarse pitch. CONSTITUTION:In the first square scanning, the entire inspection range of a material 12 to be inspected is rapidly scanned at a coarse pitch P2. During this scanning, an abnormal place 36 is detected by an ultrasonic flaw detector 15 and specified on the basis of the indication signal of the abnormal place and the position data from a positioning control part 17 and the position data is stored in a position data memory part 18 each time. When the square scanning at the coarse pitch P2 is completed, an ultrasonic probe 11 is returned to the periphery of the abnormal place 37 on the basis of the position data of the memory part 18 and, at first, when the abnormal place 37 is caused by the contact inferiority of the material 12 to be inspected and the probe 11 or the coating inferiority of a contact medium 13, the periphery of the abnormal place 37 is again subjected to square scanning at the coarse pitch P2. When the abnormal place 37 is caused by the flaw of the material 12 to be inspected, the appropriate range thereof is further subjected to detailed square scanning at a dense pitch P1. |
