| 摘要 |
PURPOSE: A semiconductor fabricating equipment is provided to recognize easily process information by digitalizing the process information having analog characteristics such as a temperature and a pressure. CONSTITUTION: A semiconductor fabricating equipment is formed with a CPU(110), a process unit(120), and a processing support unit(130). The process unit(120) is used for setting a semiconductor process atmosphere such as a process temperature, a process pressure, and a process gas pressure for processing various semiconductor processes. The process support device(130) is used for operating the process unit(120) smoothly. The process support device(130) is formed with a measurement unit(131), an analog/digital converter(132), a display unit(133), and an interlock unit(134). The measurement unit(131) generates an analog signal by measuring the process temperature and the process pressure. The analog/digital converter(132) converts the analog signal to a digital signal.
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