| 摘要 |
<p>PURPOSE:To obtain a label and its sticking device by which the defect of a pattern is rapidly and accurately corrected by indicating the defect of the pattern formed on a mask film and the defect information thereof. CONSTITUTION:The label L where a position indicating mark A for indicating the position of the defect of the pattern of the mask film MF is printed at an optional position is stuck to the defect spot of the pattern of the mask film MF. By sticking the label L at a position corresponding to the defect of the pattern of the mask film MF in the unit of specified distance dimension Y, the defect position is accurately indicated by the mark A printed corresponding to a position obtained by subdividing the distance dimension, and the structure of a label sticking device is simplified.</p> |
