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发明名称
METHOD FOR ETCHING IRON ALLOY
摘要
申请公布号
JPH0372090(A)
申请公布日期
1991.03.27
申请号
JP19890208247
申请日期
1989.08.11
申请人
NEC CORP
发明人
HAYAKAWA TAKESHI
分类号
C23F1/28;H01L23/50
主分类号
C23F1/28
代理机构
代理人
主权项
地址
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