发明名称 METHOD FOR DETECTING MOLDING AND CHIP ATTCHING STATE
摘要 A method for detecting a molding state and a chip attaching state of a semiconductor package is provided to determine automatically the molding state and the chip attaching state by using a vision system. A substrate is loaded on a table(20) after a chip attaching process or a molding process. A chip attaching state on the substrate is detected by shifting a vision camera(12) along X-Y coordinates. A molding state on the substrate is detected by shifting the vision camera along the X-Y coordinates. The data detected by the vision camera are compared with the predetermined reference data. The compared result is displayed by using a numeric expression method and a visual expression method.
申请公布号 KR100690180(B1) 申请公布日期 2007.02.26
申请号 KR20050110477 申请日期 2005.11.18
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 KIM, CHANG SU;KWON, YOUNG JOON;KIM, DONG JUNG
分类号 H01L21/66;H01L21/56 主分类号 H01L21/66
代理机构 代理人
主权项
地址