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经营范围
发明名称
SPIN COATING DEVICE
摘要
申请公布号
JPH01320728(A)
申请公布日期
1989.12.26
申请号
JP19880152282
申请日期
1988.06.22
申请人
HITACHI LTD
发明人
OBARA KATSUMI;KAWAMURA HIROMITSU;KAWAMURA TAKAO
分类号
H01J9/20
主分类号
H01J9/20
代理机构
代理人
主权项
地址
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